Ion-wave stabilization of an inductively coupled plasma

Applied Physics Letters

Volumn 88, Issue 17, 2006, Pages

  Camparo, J C ^a   MacKay, R ^a,b  

^a AEROSPACE CORPORATION   (United States)

^b WHITTIER COLLEGE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORRECTION SIGNAL; ILLUMINATION TECHNOLOGY; ION-WAVE STABILIZATION; OPTICAL EMISSION; RF POWER;

ATOMIC CLOCKS; CHEMICAL ANALYSIS; COUPLED CIRCUITS; INDUCTIVELY COUPLED PLASMA; RADIO WAVES; RESONANCE; SIGNAL PROCESSING;

PLASMA APPLICATIONS;

EID: 33646402660     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2198108     Document Type: Article

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