Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputtering

Wuli Xuebao/Acta Physica Sinica

Volumn 55, Issue 4, 2006, Pages 1965-1973

  Liu, Zhi Wen ^a   Gu, Jian Feng ^a   Sun, Cheng Wei ^a   Zhang, Qing Yu ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Growth kinetics; Nucleation; Reactive magnetron sputtering; ZnO film

Indexed keywords

EID: 33646378424     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (28)