XPS study of aluminum oxides deposited on PET thin film

Journal of Industrial and Engineering Chemistry

Volumn 6, Issue 3, 2000, Pages 149-156

  Yang, Chang Soo ^a   Kim, Jung Sik ^a   Choi, Jang Woo ^a   Kwon, Moo Hyun ^b   Kim, Young Joo ^c   Choi, Jeong Gil ^a   Kim, Geug Tae ^a  

^a Hannam University   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Aluminum oxides; Ceramic coating; Polyethylene terephtalate; XPS

Indexed keywords

EID: 33646369769     PISSN: 1226086X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

1. R. Cueff, G. Baud, J. P. Besse, and M. Jacquet, Thin Solid Films, 266, 198 (1995).
2. Y.-C. Kim, H-H. Park, J. S. Chun, and W-J. Lee, Thin Solid Films, 237, 57 (1994).
3. F. Bodino, G. Baud, M. Benmalek, J. P. Besse, H.M. Dunlop, and M. Jacquet, Thin Solid Films, 241, 21 (1994).
4. T.N. Kennedy, Electron Packg. Prod., 14, 136 (1974).
5. R.S. Nowicki, Solid State Technology, 12, 83 (1980).
6. C. Deshpandey and L. Holland, Thin Solid Films, 96, 265 (1982).
7. T. Roth, K. H. Kloos, and E. Broszeit, Thin Solid Films, 153, 123 (1987).
8. N. R. Rajopadhye, S. B. Dake and S. V. Bhoraskar, Thin Solid Films, 142, 127 (1986).
9. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer, Eden Prairie, MN (1992).
10. J.-G. Choi and L. T. Thompson, Appl. Surf. Sci., 93, 143 (1996).
11. J.-G. Choi, J. Ha, and J-W Hong, Appl. Catal A. 168, 47 (1998).
12. D. Briggs and M.P. Seah, Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, John Wiley and Sons, New York (1983).
13. J.-G. Choi, J. R. Brenner, C. R. Colling, B. G. Demczyk, J. L. Dunning, and L. T. Thompson, Catal. Today, 15, 201 (1992).
14. J.-G. Choi, J. Catal., 182, 104 (1998).
15. S. A. Campbell, The Science and Engineering of Microelectronic Fabrication, Oxford University. Press, (1996).
16. L. Pauling, The Nature of the Chemical Bond, 3rd ed., Cornell University Press, Ithaca, NY (1960).
17. N. Marechal, E. Quesnel, and Y. Pauleau, Thin Solid Films, 241, 34 (1994).