Sharpness search algorithms for automatic focusing in the scanning electron microscope

Scanning

Volumn 23, Issue 2, 2001, Pages 112-113

  Batten, C F ^a   Holburn, D M ^a   Breton, B C ^a   Caldwell, N H M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33646196881     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. th European Congress on Electron Microscopy, Czechoslovak Society for Electron Microscopy, (Brno) 3, 411-412 (2000)
2. Tee WJ, Smith KCA, Holburn DM: An automatic focusing and stigmating system for the SEM. Journal of Physics E: Scientific Instrumentation, 12, 35-38 (1979)
3. Batten CF: Autofocusing and Astigmatism Correction in the Scanning Electron Microscope, Master's Thesis, University of Cambridge (2000) (unpublished)