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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6114, Issue , 2006, Pages

Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding

(6) Bakke, Thor a Völker, Benjamin a Rudloff, Dirk a Friedrichs, Martin a Schenk, Harald a Lakner, Hubert a

a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS (Germany)

Author keywords

Maskless lithography; Micromirrors; Optical MEMS; Spatial light modulator; Wafer bonding

Indexed keywords

ARRAYS; ELECTRODES; SILICON; SILICON ON INSULATOR TECHNOLOGY; SPUTTERING; ULTRAVIOLET RADIATION;

MASKLESS LITHOGRAPHY; MICROMIRRORS; OPTICAL MEMS; SPATIAL LIGHT MODULATOR; WAFER BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 33646166805 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.646182 Document Type: Conference Paper

Times cited : (12)

References (7)

1
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- Ljungblad, U.B.¹ Askebjer, P.² Karlin, T.³ Sandstrom, T.⁴ Sjoeberg, H.⁵

2
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- Mechanical stability of spatial light modulators in microlithography
- January
- U. Dauderstädt. P. Dürr, U. Ljungblad, T. Karlin, H. Schenk, H. Lakner, "Mechanical Stability of Spatial Light Modulators in Microlithography", Proc. SPIE, vol. 5721, pp. 64-71, January 2005
- (2005) Proc. SPIE , vol.5721 , pp. 64-71
- Dauderstädt, U.¹ Dürr, P.² Ljungblad, U.³ Karlin, T.⁴ Schenk, H.⁵ Lakner, H.⁶

3
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- Improved vision by eye aberration correction using an active-matrix-addressed micromirror array
- January
- A. Gehner, M. Wildenhain, W. Doleschal, A. Elgner, H. Schenk, H. Lakner, "Improved vision by eye aberration correction using an active-matrix- addressed micromirror array", Proc. SPIE, vol. 4985, pp. 180-192, January 2003
- (2003) Proc. SPIE , vol.4985 , pp. 180-192
- Gehner, A.¹ Wildenhain, M.² Doleschal, W.³ Elgner, A.⁴ Schenk, H.⁵ Lakner, H.⁶

4
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- Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bonding
- August
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- Niklaus, F.¹ Haasl, S.² Stemme, G.³

5
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- Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding
- January
- T. Bakke, M. Friedrichs, B. Völker, M. Reiche, L. Leonardsson, H. Schenk, H. Lakner, "Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding", Proc. SPIE, vol. 5715, pp. 69-80, January 2005
- (2005) Proc. SPIE , vol.5715 , pp. 69-80
- Bakke, T.¹ Friedrichs, M.² Völker, B.³ Reiche, M.⁴ Leonardsson, L.⁵ Schenk, H.⁶ Lakner, H.⁷

6
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- Wafer bonding for optical MEMS
- May
- T. Bakke, B. Völker, H. Schenk, I. Radu, and M. Reiche, "Wafer bonding for optical MEMS", Proc. ECS, PV2005-02, pp. 184-193, May 2005
- (2005) Proc. ECS , vol.PV2005-02 , pp. 184-193
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7
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- Controlling CD variations in a massively parallel pattern generator
- Optical Microlithography XV, July
- J. Z. Luberek, A. Carroll, M. Allen, T. Sandstrom, A. Karawajczyk, "Controlling CD variations in a massively parallel pattern generator", Proc. SPIE, vol. 4691, p. 671-678, Optical Microlithography XV, July 2002
- (2002) Proc. SPIE , vol.4691 , pp. 671-678
- Luberek, J.Z.¹ Carroll, A.² Allen, M.³ Sandstrom, T.⁴ Karawajczyk, A.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.