Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6113, Issue , 2006, Pages

  Stewart, Jason B ^a   Bifano, Thomas G ^b,c   Bierden, Paul ^c   Cornelissen, Steven ^c   Cook, Timothy ^d   Martin Levine, B ^e  

^a Boston University   (United States)

^b BOSTON UNIVERSITY   (United States)

^c BOSTON MICROMACHINES CORPORATION   (United States)

^d Boston University   (United States)

^e CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMABLE MIRROR; NULLING CORONAGRAPH ARCHITECTURE; PISTON MIRROR ARRAY; POLYSILICON MICROFABRICATION;

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); DIAPHRAGMS; EPITAXIAL GROWTH; MIRRORS; OPTICAL DESIGN; POLYSILICON; SURFACE ROUGHNESS;

ADAPTIVE OPTICS;

EID: 33646122458     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.651373     Document Type: Conference Paper

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