An optimal process of femtosecond laser cutting of NiTi shape memory alloy for fabrication of miniature devices

Optics and Lasers in Engineering

Volumn 44, Issue 10, 2006, Pages 1078-1087

  Li, Chengde ^a   Nikumb, Suwas ^b   Wong, Franklin ^c  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c DEFENCE RESEARCH AND DEVELOPMENT CANADA VALCARTIER   (Canada)

Author keywords

Femtosecond laser; Material processing; MEMS; Microcomponents; Shape memory alloy

Indexed keywords

LASER BEAM EFFECTS; MOTION PLANNING; NICKEL ALLOYS; PORTABLE EQUIPMENT; SHAPE MEMORY EFFECT;

FEMTOSECOND LASER; LASER FLUENCES; MATERIAL PROCESSING; MICROCOMPONENTS;

LASER BEAM CUTTING;

EID: 33646110751     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2005.08.003     Document Type: Article

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