Influence of the primary ion beam profile and the energy analyzer optics to the LEIS spectra: The analytical study

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 237, Issue 3-4, 2005, Pages 613-622

  Bundaleski, N ^a   Ristic Z ^a   Radovic M ^a   Rakocevic Z ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Energy analyzer; Low energy ion scattering; Primary ion beam profile

Indexed keywords

IONS; PLASMA INTERACTIONS;

COMPOSITION ANALYSIS; ENERGY ANALYZER; EXPERIMENTAL DEVICES; EXPERIMENTAL PROBLEMS; EXPERIMENTAL SYSTEM; EXPERIMENTAL TECHNIQUES; ION BEAM PROFILES; LOW ENERGY ION SCATTERING;

ION BEAMS;

EID: 33646082155     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.03.009     Document Type: Article

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