Conduction in ultra-thin SOI nanowires prototyped by FIB milling

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1718-1720

  Pott, Vincent ^a   Ionescu, Adrian M ^a  

^a EPFL   (Switzerland)

Author keywords

Focused ion beam; Hopping conduction mode; Silicon nanowire; SOI

Indexed keywords

COMMINUTION; ELECTRIC CONDUCTIVITY; ION BEAMS; OSCILLATIONS; SILICON ON INSULATOR TECHNOLOGY;

FOCUSED ION BEAM; HOPPING CONDUCTION MODE; SI-WIRES; SILICON NANOWIRE;

NANOSTRUCTURED MATERIALS;

EID: 33646069657     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.116     Document Type: Article

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