Electron beam lithography, a helpful tool for nanooptics

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1464-1467

  Hohenau, Andreas ^a   Ditlbacher, Harald ^a   Lamprecht, Bernhard ^b   Krenn, Joachim R ^a   Leitner, Alfred ^a   Aussenegg, Franz R ^a  

^a UNIVERSITY OF GRAZ   (Austria)

^b JOANNEUM RESEARCH   (Austria)

Author keywords

Metal nanostructure; Nanooptics; Plasmon; Spectral coding

Indexed keywords

DATA STORAGE EQUIPMENT; FIBER OPTICS; MICROELECTRONICS; NANOSTRUCTURED MATERIALS;

METAL NANOSTRUCTURE; NANOOPTICS; PLASMON; SPECTRAL CODING;

ELECTRON BEAM LITHOGRAPHY;

EID: 33646053841     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.085     Document Type: Article

References (9)

1. Hunsperger R.G. Integrated Optics (2002), Springer
2. Räther H. Surface Plasmons on Smooth and Rough Surfaces and on Gratings. Springer Tracts in Modern Physics vol. 111 (1988), Springer, Berlin
3. Kreibig U., and Vollmer M. Optical Properties of Metal Clusters vol. 25 (1995), Springer
4. McCord M.A., and Rooks M.J. Handbook of Microlithography, Micromachining and Microfabrication vol. 1 (1997), SPIE and The Institution of Electrical Engineers, Bellingham, Washington (Section 2)
5. Berini P. Phys. Rev. B 63 (2000) 125417
6. Lamprecht B., Krenn J.R., Schider G., Ditlbacher H., Salerno M., Felidj N., Leitner A., and Aussenegg F.R. Appl. Phys. Lett. 79 1 (2001) 51
7. Krenn J.R., Lamprecht B., Ditlbacher H., Schider G., Salerno M., Leitner A., and Aussenegg F.R. Europhys. Lett. 60 5 (2002) 663
8. Schaadt M., Feng B., and Yu E.T. Appl. Phys. Lett. 86 (2005) 063106
9. Ditlbacher H., Krenn J.R., Lamprecht B., Leitner A., and Aussenegg F.R. Opt. Lett. 25 8 (2000) 563