Characterization of imprinting polymeric temperature variation with fluorescent Rhodamine B molecule

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 864-868

  Ko, Fu Hsiang ^a   Weng, Li Yu ^b   Ko, Chu Jung ^b   Chu, Tieh Chi ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b YUANPEI UNIVERSITY   (Taiwan)

Author keywords

Imprinting temperature variation; Nanoimprint lithography; Rhodamine B molecule

Indexed keywords

FLUORESCENCE; POLYMERS; PRECIPITATION (CHEMICAL); SENSORS; SILICON WAFERS; THERMAL STRESS;

IMPRINTING TEMPERATURE VARIATION; NANOIMPRINT LITHOGRAPHY; RHODAMINE B MOLECULE;

TEMPERATURE CONTROL;

EID: 33646045889     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.009     Document Type: Article

References (18)

1. Ochiai Y., Baba M., Watanabe H., and Matsui S. Jpn. J. Appl. Phys. Part 1 30 (1991) 3266
2. Chou S.Y., Krauss P.R., and Renstrom P.J. Appl. Phys. Lett. 67 (1995) 3114
3. Ohta H., Matsuzaka T., Saitou N., Kawasaki K., Nakamura K., Kohno T., and Hoga M. Jpn. J. Appl. Phys. Part 1 31 (1992) 4253
4. Perret C., Gourgon C., Micouin G., and Grolier J.P. Jpn. J. Appl. Phys. Part 1 41 (2002) 4203
5. Varesi J., and Majumdar A. Appl. Phys. Lett. 72 (1998) 37
6. Chen T.F., Nguyen K.T., Wen S.S.L., and Jen C.K. Meas. Sci. Technol. 10 (1999) 139
7. Maier C. Polym. Eng. Sci. 36 (1996) 1502
8. Migler K.B., and Bur A.J. Polym. Eng. Sci. 38 (1998) 213
9. Izaguirre F., Csanky G., and Hawkins G.F. Rev. Sci. Instrum. 62 (1991) 1916
10. Lupton J.M. Appl. Phys. Lett. 80 (2002) 186
11. Kolodner P., and Tyson J.A. Appl. Phys. Lett. 40 (1982) 782
12. Kolodner P., Katzir A., and Hartsough N. Appl. Phys. Lett. 42 (1983) 749
13. Goss L.P., Smith A.A., and Post M.E. Rev. Sci. Instrum. 60 (1989) 3702
14. Ko F.H., Wang M.Y., and Wang T.K. Anal. Chem. 71 (1999) 5413
15. Gourgon C., Perret C., and Micouin G. Microelectron. Eng. 61-2 (2002) 385
16. Arbeloa I.L., and Rohatgimukherjee K.K. Chem. Phys. Lett. 128 (1986) 474
17. Rosenthal I., Peretz P., and Muszkat K.A. J. Phys. Chem. 83 (1979) 350
18. Arbeloa I.L., and Ruizojeda P. Chem. Phys. Lett. 79 (1981) 347