High-density silicon nanowire growth from self-assembled Au nanoparticles

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1530-1533

  Albuschies, J ^a   Baus, M ^a   Winkler, O ^a   Hadam, B ^a   Spangenberg, B ^a   Kurz, H ^b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b AMO GMBH   (Germany)

Author keywords

Chemical vapor deposition; Gold nanoparticles; Silicon nanowires; Vapor liquid solid

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EVAPORATION; GOLD; GROWTH (MATERIALS); SELF ASSEMBLY; SILVER;

GOLD NANOPARTICLES; SELF-ASSEMBLED NANOPARTICLES; SILICON NANOWIRES; VAPOR-LIQUID-SOLID;

NANOSTRUCTURED MATERIALS;

EID: 33646023168     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.145     Document Type: Article

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