Noncontinuum gas-phase heat transfer from a heated microbeam to the adjacent substrate

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 721-730

  Gallis, M A ^a   Torczynski, J R ^a   Rader, D J ^a   Bainbridge, B L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL MOLECULES; DIRECT SIMULATION MONTE CARLO (DSMC) METHOD; HEATING-INDUCED EXPANSION; MICROBEAM;

COMPUTATIONAL GEOMETRY; COMPUTATIONAL METHODS; HEATING; SUBSTRATES; THERMAL EXPANSION;

HEAT TRANSFER;

EID: 33646022577     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81683     Document Type: Conference Paper

References (12)

1. Karniadakis, G. E., and Beskok, A., 2002, Micro Flows: Fundamentals and Simulation, Springer-Verlag, New York, NY.
2. Fluent, Inc., 1998, FIDAP 8 User's Manuals, Version 8, Volumes 1-8, Fluent, Inc., Lebanon, NH.
3. Calore Development Team, 2005, Calore: A Computational Heat Transfer Program, Version 4.1 User's Manual, http://calore.sandia.gov/index.php.
4. Bird, G. A., 1994, Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford, UK.
5. Wagner, W., 1992, "A Convergence Proof for Bird's Direct Simulation Monte Carlo Method for the Boltzmann Equation," Journal of Statistical Physics, 66 (3/4), pp. 1011-1044.
6. Bartel, T. J., Plimpton, S. J., and Gallis, M. A., 2001, Icarus: A 2-D Direct Simulation Monte Carlo (DSMC) Code for Multi-Processor Computers, Report SAND2001-2901, Sandia National Laboratories, Albuquerque, NM.
7. Sniegowski, J. J., and de Boer, M. P., 2000, "IC-Compatible Polysilicon Surface Micromachining," Annual Reviews of Material Science, 30, pp. 299-333.
8. Emsley, J., 1989, The Elements, Clarendon Press, Oxford, UK.
9. White, F. M., 1984, Heat Transfer, Addison-Wesley, Reading, MA.
10. Bird, G. A., 1976, Molecular Gas Dynamics, Clarendon Press, Oxford, UK.
11. Rader, D. J., Gallis, M. A., Torczynski, J. R., and Wagner, W., 2004, "DSMC Convergence Behavior for Fourier Flow," in Rarefied Gas Dynamics: 24th International Symposium, edited by M. Capitelli, American Institute of Physics, Melville, NY, pp. 473-478.
12. Chapman, S., and Cowling, T. G., 1970, The Mathematical Theory of Non-Uniform Gases, Third Edition, Cambridge University Press, Cambridge, UK.