Vaporization and deposition of an intact polyimide precursor by resonant infrared pulsed laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6107, Issue , 2006, Pages

  Dygert, N L ^a   Schriver, K E ^a   Haglund Jr , R F ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

Infrared free electron laser; Plume shadowgraphy; Polyimide; Resonant infrared pulsed laser ablation

Indexed keywords

DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER ABLATION; PULSED LASER APPLICATIONS; SUBSTRATES; THERMAL EFFECTS; VAPORIZATION;

INFRARED FREE ELECTRON LASER; PLUME SHADOWGRAPHY; POLYAMIC ACID (PAA); RESONANT INFRARED PULSED LASER ABLATION; SHADOWGRAPHY; THERMAL CURING;

POLYIMIDES;

EID: 33646007946     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.646906     Document Type: Conference Paper

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