Design and optimization of thermomechanical actuator via contour shaping

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 201-208

  Chen, Shih Chi ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATOR STROKE; CONTOUR SHAPING; THERMAL STRAIN; THERMOMECHANICAL ACTUATOR;

CONTOUR MEASUREMENT; ERROR ANALYSIS; FINITE ELEMENT METHOD; NONLINEAR SYSTEMS; OPTIMIZATION; PARAMETER ESTIMATION; PERFORMANCE; STIFFNESS; STRAIN; THERMAL EFFECTS; THERMOMECHANICAL TREATMENT;

ACTUATORS;

EID: 33645989157     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-79780     Document Type: Conference Paper

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