A surface-micromachined nitride-diaphragm high-pressure sensor for oil well application

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 425-429

  Xu, Yong ^a   Jiang, Fukang ^a   Tai, Yu Chong ^a   Donzier, Eric ^b   Loomis, William A ^c   Liberman, Arthur D ^c  

^a California Institute of Technology   (United States)

^b SCHLUMBERGER CAMBRIDGE RESEARCH   (United Kingdom)

^c SCHLUMBERGER DOLL RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NITRIDES; OIL WELL FLOODING; OIL WELLS; PRESSURE SENSORS;

EXCITATION VOLTAGE; HIGH PRESSURE SENSORS; PIEZORESISTOR; TEMPERATURE COEFFICIENT;

DIAPHRAGMS;

EID: 33645972363     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1126     Document Type: Conference Paper

References (8)

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