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Volumn 559, Issue 2, 2006, Pages 564-566
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Fabrication and test of Superconducting Single Photon Detectors
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Author keywords
Electron beam lithography; Single photon detectors; Superconducting thin film nanostructures
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Indexed keywords
ELECTRON BEAM LITHOGRAPHY;
FABRICATION;
MAGNETRON SPUTTERING;
OPTICAL RESONATORS;
PHOTONS;
SUPERCONDUCTING MATERIALS;
SINGLE PHOTON DETECTORS;
SUPERCONDUCTING SINGLE PHOTON DETECTORS (SSPDS);
SUPERCONDUCTING THIN-FILM NANOSTRUCTURES;
DETECTORS;
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EID: 33645880430
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2005.12.054 Document Type: Article |
Times cited : (25)
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References (1)
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