Fabricating interlocking support walls, with an adjustable backshort, in a TES bolometer array for far-infrared astronomy

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 559, Issue 2, 2006, Pages 548-550

  Miller, Timothy M ^a,b   Abrahams, John H ^a,b   Allen, Christine A ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

^b QSS GROUP INC   (United States)

Author keywords

3D micro machining; Detector fabrication; Gray scale lithography; Infrared astronomy

Indexed keywords

ARRAYS; DETECTORS; LITHOGRAPHY; MICROMACHINING; SENSORS;

3D MICRO-MACHINING; DETECTOR FABRICATION; GRAY-SCALE LITHOGRAPHY; INFRARED ASTRONOMY;

BOLOMETERS;

EID: 33645858536     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2005.12.067     Document Type: Article

References (5)

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4. W. Henke, et al., Proceedings of the IEEE Micro Electro Mechanical Syst. MEMS, Oiso, Japan, 1994, p. 205.
5. Rogers J.D., et al. Opt. Express 12 (2004) 1294