Effect of calcination time on the physical properties of synthesized ceria particles for the shallow trench isolation chemical mechanical planarization process

Journal of Ceramic Processing Research

Volumn 7, Issue 1, 2006, Pages 53-57

  Kim, Sang Kyun ^a   Paik, Ungyu ^a   Park, Jea Gun ^a  

^a Hanyang University   (South Korea)

Author keywords

Agglomeration; Calcination; Ceria; Crystallinity; STI CMP

Indexed keywords

EID: 33645830318     PISSN: 12299162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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