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Volumn 77, Issue 3, 2006, Pages
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Negative-ion yield in low-pressure radio frequency discharges in hydrogen: Particle modeling and vibrational kinetics
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Author keywords
[No Author keywords available]
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Indexed keywords
MATHEMATICAL MODELS;
NATURAL FREQUENCIES;
NEGATIVE IONS;
PLASMA THEORY;
VIBRATIONS (MECHANICAL);
PARTICLE MODELING;
RADIO FREQUENCY DISCHARGES;
VIBRATIONAL KINETICS;
HYDROGEN;
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EID: 33645820045
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2151891 Document Type: Conference Paper |
Times cited : (8)
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References (8)
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