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Volumn 77, Issue 3, 2006, Pages
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Study of a liquid metal ion source for external ion injection into electron-beam ion source
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CURRENTS;
FREQUENCIES;
GOLD;
ION BEAMS;
ION IMPLANTATION;
ION SOURCES;
ELECTRON-BEAM ION SOURCE(EBIS);
ION CURRENT;
LIQUID METAL ION SOURCE (LMIS);
NORMALIZED EMITTANCE;
PULSE WIDTH;
LIQUID METALS;
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EID: 33645805679
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2166428 Document Type: Conference Paper |
Times cited : (8)
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References (6)
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