Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranes

Wuli Xuebao/Acta Physica Sinica

Volumn 55, Issue 3, 2006, Pages 1517-1522

  Wang, Sen ^a   Yu, Guo Jun ^a   Gong, Jin Long ^a   Li, Qin Tao ^a   Zhu, De Zhang ^a   Zhu, Zhi Yuan ^a  

^a SHANGHAI INSTITUTE OF APPLIED PHYSICS   (China)

Author keywords

Ion beam etching; Porous anodic aluminum oxide membrane

Indexed keywords

EID: 33645779760     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (20)