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Volumn , Issue , 2003, Pages 21-24
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Application of waveguide technology for calculating the profile of photoinduced plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
HFSS SIMULATION;
PHOTOINDUCED PLASMA;
PLASMA PROFILES;
REFLECTARRAY ANTENNAS;
WAVEGUIDE TECHNOLOGY;
ANTENNA ARRAYS;
ELECTROMAGNETISM;
FREQUENCY BANDS;
PLASMAS;
SILICON;
WAVEGUIDES;
SILICON WAFERS;
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EID: 33645717503
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (5)
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