In situ real-time infrared spectroscopy study of formation of porous anodic alumina on Si

Journal of the Electrochemical Society

Volumn 153, Issue 5, 2006, Pages

  Kimura, Yasuo ^a,b   Shiraki, Hirokazu ^a   Ishibashi, Ken Ichi ^a   Ishii, Hisao ^a,b   Itaya, Kingo ^a,b,c   Niwano, Michio ^a,b,c  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ELECTROLYTES; ETCHING; INFRARED SPECTROSCOPY; POROUS MATERIALS; REAL TIME SYSTEMS; SCANNING ELECTRON MICROSCOPY;

ALUMINA PORE; INHOMOGENEOUS ETCHING; POROUS ALUMINA FILM; SUBSTRATE SURFACE;

ALUMINA;

EID: 33645697177     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2180711     Document Type: Article

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