Optically driven micromachines: Progress and prospects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6038, Issue , 2006, Pages

  Nieminen, Timo A ^a   Higuet, Julien ^a   Knöner, Gregor ^a   Loke, Vincent L Y ^a   Parkin, Simon ^a   Singer, Wolfgang ^a   Heckenberg, Norman R ^a   Rubinsztein Dunlop, Halina ^a  

^a UNIVERSITY OF QUEENSLAND   (Australia)

Author keywords

Laser trapping; MEMS; Micromachines; Optical torque; Optical tweezers

Indexed keywords

MICROMACHINING; OPTICAL DEVICES; TORQUE;

LASER TRAPPING; OPTICAL TORQUE; OPTICAL TWEEZERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33645669084     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.651760     Document Type: Conference Paper

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