Synthesis of high transparent poly(o-hydroxy amide) in the i line region

Polymer Preprints, Japan

Volumn 54, Issue 1, 2005, Pages 1616-

  Toyokawa, Fumihiro ^a   Shibasaki, Yuji ^a   Ando, Shinji ^a   Ueda, Mitsuru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

2,2' dimethyl 3,3' bisbennzoic acid; Density functional theory; i line photolithography; Poly(o hydroxyamide); Polybenzoxazole

Indexed keywords

CROSSLINKING; PHOTOLITHOGRAPHY; PROBABILITY DENSITY FUNCTION; SYNTHESIS (CHEMICAL); THIN FILMS;

2,2'-DIMETHYL-3,3'-BISBENNZOIC ACID; I-LINE PHOTOLITHOGRAPHY; POLY(O-HYDROXYAMIDE); POLYBENZOXAZOLE;

POLYAMIDES;

EID: 33645650642     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)