Design and fabrication of micro channels for MEMS applications

Synthesis and Reactivity in Inorganic, Metal-Organic and Nano-Metal Chemistry

Volumn 36, Issue 2, 2006, Pages 185-191

  Guruparan, G Kumara ^a   Sathish, M ^a   Subramaniam, N Sankara ^a   Kumar, T Sorna ^a  

^a THIAGARAJAR COLLEGE OF ENGINEERING   (India)

Author keywords

Liquid cooling; Micro fabrication; Thermal analysis

Indexed keywords

EID: 33645534825     PISSN: 15533174     EISSN: 15533182     Source Type: Journal    
DOI: 10.1080/15533170500524595     Document Type: Article

References (7)

1. Tuckerman, D. B.; Pease, R. F. W. High- performance heat sinking for VLSI. IEEE electron. Device Lett. 1981, EDL-2, 126-129.
2. Wu, P. Y.; Little, W. A. Measurement of friction factor for the flow of gases in very fine channels used for micro miniature Joule-Thomson refrigerators. Cryogenics 1983, 23, 273-277.
3. Wu, P. Y.; Little, W. A. Measurement of the heat transfer characteristics of gas flow in fine channel heat exchangers for micro miniature refrigerators. Cryogenics 1984, 24, 415-420.
4. Phillips, R. J.; Glicksman, L. R.; Larson, R. Forced convection, liquid-cooled, micro channel heat sinks for high-power-density microelectronics, Proceedings Int. Symp. Cooling Technology for Electronics Equip, Honolulu, HI, USA, 1987; 227-248.
5. Choi, S. B.; Barron, R. F.; Warrington, R. O. Fluid flow and heat transfer in micro tubes. Micromechanical Sensors, Actuators and Systems; ASME DSC 1991, 32, 123-134.
6. Qu, W.; Mala, G. M.; Li, D. Heat transfer for water flow in trapezoidal silicon microchannels. Intl. J. Heat Mass Trans. 2000, 43 (21), 3925-3936.
7. Qu, W.; Mudawar, I. Experimental and numerical study of pressure drop and heat transfer in a single-phase micro-channel heat sink. Intl. J. Heat Mass Trans. 2001.