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Volumn 28, Issue 5-6, 2006, Pages 610-617
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Manufacturing performance evaluation for IC products
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Author keywords
Integrated circuit (IC); Manufacturing performance; Yield analysis; Yield model
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Indexed keywords
COMPUTATIONAL COMPLEXITY;
DEFECTS;
MANUFACTURE;
MATHEMATICAL MODELS;
PERFORMANCE;
MANUFACTURING PERFORMANCE;
PRODUCTION LINE;
YIELD ANALYSIS;
YIELD MODEL;
INTEGRATED CIRCUITS;
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EID: 33645530571
PISSN: 02683768
EISSN: 14333015
Source Type: Journal
DOI: 10.1007/s00170-004-2382-2 Document Type: Article |
Times cited : (9)
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References (12)
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