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Volumn 28, Issue 5-6, 2006, Pages 610-617

Manufacturing performance evaluation for IC products

Author keywords

Integrated circuit (IC); Manufacturing performance; Yield analysis; Yield model

Indexed keywords

COMPUTATIONAL COMPLEXITY; DEFECTS; MANUFACTURE; MATHEMATICAL MODELS; PERFORMANCE;

EID: 33645530571     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-004-2382-2     Document Type: Article
Times cited : (9)

References (12)
  • 1
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    • The use and evaluation of yield models in integrated circuit manufacturing
    • Cunningham JA (1990) The use and evaluation of yield models in integrated circuit manufacturing. IEEE Trans Semicond Manuf 3:60-71
    • (1990) IEEE Trans Semicond Manuf , vol.3 , pp. 60-71
    • Cunningham, J.A.1
  • 2
    • 0021782318 scopus 로고
    • The effects of wafer to wafer density variation on Integrated circuit defect and fault distributions
    • Stapper CH (1985) The effects of wafer to wafer density variation on Integrated circuit defect and fault distributions. IBM J Res Dev 29:87-97
    • (1985) IBM J Res Dev , vol.29 , pp. 87-97
    • Stapper, C.H.1
  • 4
    • 84938162176 scopus 로고
    • Cost-size optima of monolithic integrated circuits
    • Murphy BT (1964) Cost-size optima of monolithic integrated circuits. Proceedings of the IEEE 52:1537-1545
    • (1964) Proceedings of the IEEE , vol.52 , pp. 1537-1545
    • Murphy, B.T.1
  • 6
    • 0026257569 scopus 로고
    • Optimized redundancy selection based on failure-related yield model for 64Mb DRAM and beyond
    • Kikuda S, Miyamoto H (1991) Optimized redundancy selection based on failure-related yield model for 64Mb DRAM and beyond, IEEE J Solid State Circuits 26:1550-1555
    • (1991) IEEE J Solid State Circuits , vol.26 , pp. 1550-1555
    • Kikuda, S.1    Miyamoto, H.2
  • 7
    • 0022102574 scopus 로고
    • Modeling the critical area in yield forecasts
    • Ferris-Prabhu AV (1985) Modeling the critical area in yield forecasts. IEEE J Solid State Circuits 20:874-878
    • (1985) IEEE J Solid State Circuits , vol.20 , pp. 874-878
    • Ferris-Prabhu, A.V.1
  • 8
    • 0025430458 scopus 로고
    • A cluster-modified Poisson model for estimating defect density and yield
    • Ferris-Prabhu AV (1990) A cluster-modified Poisson model for estimating defect density and yield. IEEE Trans Semicond Manuf 3:54-59
    • (1990) IEEE Trans Semicond Manuf , vol.3 , pp. 54-59
    • Ferris-Prabhu, A.V.1
  • 9
    • 0024629198 scopus 로고
    • Large-area fault clusters and fault tolerance in VSLI circuits
    • Stapper CH (1989) Large-area fault clusters and fault tolerance in VSLI circuits. IBM J Res Develop 33(2):162-173
    • (1989) IBM J Res Develop , vol.33 , Issue.2 , pp. 162-173
    • Stapper, C.H.1
  • 10
    • 0024627901 scopus 로고
    • Small-area fault clusters and fault tolerance in VSLI circuits
    • Stapper CH (1989) Small-area fault clusters and fault tolerance in VSLI circuits. IBM J Res Develop 33(2):174-177
    • (1989) IBM J Res Develop , vol.33 , Issue.2 , pp. 174-177
    • Stapper, C.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.