A simple approach to solving multi-response quality characteristic problems in CMOS ion implantation

International Journal of Advanced Manufacturing Technology

Volumn 28, Issue 5-6, 2006, Pages 592-595

  Lin, Chin Tsai ^a   Chang, Che Wei ^a   Chen, Chie Bein ^b  

^a YUANPEI UNIVERSITY   (Taiwan)

^b NATIONAL DONG HWA UNIVERSITY   (Taiwan)

Author keywords

Grey decision situation; Grey Taguchi methods; Multi response quality characteristics; Multi response quality characteristics CMOS implantation; Taguchi method

Indexed keywords

ALGORITHMS; DECISION MAKING; ION IMPLANTATION; PROBLEM SOLVING;

GREY DECISION SITUATION; GREY TAGUCHI METHODS; MULTI-RESPONSE QUALITY CHARACTERISTICS; MULTI-RESPONSE QUALITY CHARACTERISTICS CMOS IMPLANTATION; TAGUCHI METHOD;

CMOS INTEGRATED CIRCUITS;

EID: 33645529869     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-004-2396-9     Document Type: Article

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