Study on nitrogenated amorphous carbon films prepared by unbalanced magnetron sputtering

Journal of Applied Physics

Volumn 99, Issue 3, 2006, Pages

  Shi, J R ^a,b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b SEAGATE TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CONTACT ANGLE; FREE ENERGY; HYDROPHILICITY; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOINDENTER; NANOSCRATCH;

AMORPHOUS FILMS;

EID: 33645527801     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2168027     Document Type: Article

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