Electrical and emission properties of nanocomposite SiOx(Si) and SiO2(Si) films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 945-949

  Evtukh, A A ^a   Litovchenko, V G ^a   Semenenko, M O ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; ELECTRON TUNNELING; NANOSTRUCTURED MATERIALS; SILICATES; THERMAL EFFECTS;

EMISSION PROPERTIES; SILICON POWDER; THERMAL ANNEALING; THERMAL EVAPORATION;

THIN FILMS;

EID: 33645520118     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2183787     Document Type: Article

References (16)

1. I. Brodie and C. A. Spindt, Adv. Electron. Electron Phys. 83, 1 (1992).
2. R. B. Marcus, K. Chin, D. Liu, W. J. Orvis, D. R. Diavlo, C. E. Hunt, and J. Trujillo, Appl. Phys. Lett. 56, 236 (1990).
3. C. A. Spindt, J. Appl. Phys. 39, 3504 (1968).
4. A. A. Evtukh, V. G. Litovchenko, R. I. Marchenko, N. I. Klyui, V. A. Semenovich, and C. Nelep, J. Vac. Sci. Technol. B 14, 2130 (1996).
5. N. F. Mott and R. W. Gurney, Electron Processes in Ionic Crystals (Clarenden, Oxford, 1940), p. 310.
6. V. I. Makhov, Proceedings of the Second International Conference on Vacuum Microelectronics, IOP Conference Series Vol. 99, (Bath, UK, 1989), p. 235.
7. A. O. Christensen, U.S. Patent No. 4,663,559 (1987).
8. A. A. Evtukh, V. G. Litovchenko, R. I. Marchenko, and S. Yu. Kudzinivsky, J. Vac. Sci. Technol. B 15, 439 (1997).
9. G. Yang, K. K. Chin, and R. B. Marcus, IEEE Trans. Electron Devices 38, 2373 (1991).
10. A. A. Evtukh, V. G. Litovchenko, Yu. M. Litvin, S. Yu. Kudzinivsky, and D. V. Fedin, Phys. Low-Dimens. Semicond. Struct. 1/2, 21 (2001).
11. V. Ya. Bratus, Fiz. Tekh. Poluprovodn. (S.-Peterburg) 35, 854 (2001).
12. A. A. Evtukh, BT Technol. J. 6, 32 (2003).
13. D. J. DiMaria, J. Appl. Phys. 50, 1079 (1984).
14. K. C. Kao and W. Hwang, Electrical Transport in Solids (Pergamon, New York, 1984), Vol. 2.
15. S. M. Sze, Physics of Semiconductor Devices (Wiley-Interscience, New York, 1981), p. 455.
16. V. G. Litovchenko, A. A. Evtukh, Yu. M. Litvin, N. M. Goncharuk, and V. E. Chaika, J. Vac. Sci. Technol. B 17, 655 (1999).