Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

Journal of Applied Physics

Volumn 99, Issue 3, 2006, Pages

  Nisha, M ^a   Saji, K J ^a   Ajimsha, R S ^a   Joshy, N V ^a   Jayaraj, M K ^a  

^a Department of Physics   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; EMISSION SPECTROSCOPY; LIGHT EMISSION; NATURAL FREQUENCIES; TEMPERATURE MEASUREMENT;

ION DENSITY; OPTICAL EMISSION SPECTROSCOPY; RADIO FREQUENCY PLASMAS;

PLASMAS;

EID: 33645514823     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2171777     Document Type: Article

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