Process integration and development of inverted photonic crystal arrays

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 705-709

  Tinker, M ^a   Schonbrun, E ^b   Lee, J B ^a   Park, W ^b  

^a The University of Texas at Dallas   (United States)

^b UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTONIC CRYSTAL ARRAYS; SILICON PILLARS; SPATIAL DISTRIBUTION;

CRYSTAL STRUCTURE; CRYSTALS; DIELECTRIC PROPERTIES; PHOTONS; SILICON;

ARRAYS;

EID: 33645512591     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2180254     Document Type: Article

References (20)

1. Y. A. Vlasov, N. Moll, and S. J. McNab, J. Appl. Phys. 95, 4538 (2004).
2. S. J. McNab, N. Moll, and Y. A. Vlasov, Opt. Express 11, 2927 (2003).
3. Y. Sugimoto, N. Ikeda, N. Carlsson, K. Asakawa, N. Kawai, and K. Inoue, IEEE J. Quantum Electron. 38, 760 (2002).
4. S. Y. Lin, E. Chow, J. Bur, S. G. Johnson, and J. D. Joannopoulos, Opt. Lett. 27, 1400 (2002).
5. M. Tokushima, H. Kosaka, A. Tomita, and H. Yamada, Appl. Phys. Lett. 76, 952 (2000).
6. M. Loncar, D. Nedeljkovic, T. Doll, J. Vuckovic, A. Scherer, and T. P. Pearsall, Appl. Phys. Lett. 77, 1937 (2000).
7. M. Notomi, A. Shinya, K. Yamada, J. Takahashi, C. Takahashi, and I. Yokohama, IEEE J. Quantum Electron. 38, 736 (2002).
8. S. Y. Lin, E. Chow, S. G. Johnson, and J. D. Joannopoulos, Opt. Lett. 25, 1297 (2000).
9. W. Park and J.-B. Lee, Appl. Phys. Lett. 85, 4845 (2004).
10. J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals: Molding the Flow of Light (Princeton University Press, Princeton, NJ, 1995), Chap., p. 54.
11. A. Mekis, J. C. Chen, I. Kurland, S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. Lett. 77, 3787 (1996).
12. S. G. Johnson, P. R. Villeneuve, S. Fan, and J. D. Joannopoulus, Phys. Rev. B 62, 8212 (2000).
13. S. Assefa, Appl. Phys. Lett. 85, 6110 (2004).
14. M. Tokushima, H. Yamada, and Y. Arakawa, Appl. Phys. Lett. 84, 4298 (2004).
15. V. Poborchii, T. Tada, T. Kanayama, and A. Moroz, Appl. Phys. Lett. 82, 508 (2003).
16. V. V. Poborchii, T. Tada, and T. Kanayama, Opt. Commun. 210, 285 (2002).
17. E. Schonbrun, M. Tinker, W. Park, and J. B. Lee, IEEE Photonics Technol. Lett. 17, 1196 (2005).
18. H.-G. Kim, Y.-M. An, D.-K. Moon, and J.-G. Park, Jpn. J. Appl. Phys., Part 1 39, 1085 (2000).
19. P. A. Kawka and R. O. Buckius, Int. J. Thermophys. 22, 517 (2001).
20. M. Saito, T. Gojo, Y. Kato, and M. Miyagi, Infrared Phys. Technol. 36, 1125 (1995).