Low specific contact resistance Ti/Au contacts on ZnO

Applied Physics Letters

Volumn 88, Issue 12, 2006, Pages

  Chen, J J ^a   Jang, Soohwan ^a   Anderson, T J ^a   Ren, F ^a   Li, Yuanjie ^a   Kim, Hyun Sik ^a   Gila, B P ^a   Norton, D P ^a   Pearton, S J ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METALLIZATIONS; SPECIFIC CONTACT RESISTANCES; TEMPERATURE ANNEALS; ZN OUTDIFFUSIONS;

ANNEALING; DIFFUSION; DOPING (ADDITIVES); ELECTRIC RESISTANCE; ELECTRODES; ELECTRON SPECTROSCOPY; ELECTRON TUNNELING; LIGHT EMITTING DIODES; MORPHOLOGY; TITANIUM COMPOUNDS; ZINC OXIDE;

OHMIC CONTACTS;

EID: 33645502346     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2187576     Document Type: Article

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