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Volumn 19, Issue 5, 2006, Pages
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New growth approach of high-quality oxide thin films for future device applications: Independent control of supersaturation and migration
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Author keywords
[No Author keywords available]
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Indexed keywords
FILM GROWTH;
FREE ENERGY;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
PRECIPITATION (CHEMICAL);
SEMICONDUCTOR JUNCTIONS;
SUPERSATURATION;
IMPURITY PHASES;
INTRINSIC JOSEPHSON JUNCTIONS (IJJ);
OXIDE FILMS;
PULSED LASER INTERVAL DEPOSITION;
THIN FILMS;
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EID: 33645500064
PISSN: 09532048
EISSN: 13616668
Source Type: Journal
DOI: 10.1088/0953-2048/19/5/S12 Document Type: Article |
Times cited : (9)
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References (5)
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