Silicide phase formation in Ni/Si system: Depth-resolved positron annihilation and Rutherford backscattering study

Journal of Applied Physics

Volumn 99, Issue 3, 2006, Pages

  Abhaya, S ^a   Amarendra, G ^a   Panigrahi, B K ^a   Nair, K G M ^a  

^a INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

Author keywords

[No Author keywords available]

Indexed keywords

NICKEL; POSITRON ANNIHILATION SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTOR JUNCTIONS; SILICON;

SILICIDATION; SILICIDE;

THIN FILMS;

EID: 33645497937     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2168296     Document Type: Article

References (20)

1. S. P. Murarka, Silicides for VLSI Applications (Academic, New York, 1983).
2. J. M. Poate, K. N. Tu, and J. W. Mayer, Thin Films - Interdiffusion and Reaction (Wiley, New York, 1978).
3. D. X. Xu, S. R. Das, C. J. Peters, and L. E. Erickson, Thin Solid Films 326, 143 (1998).
4. M. C. Poon, F. Deng, M. Chan, W. Y. Chan, and S. S. Lau, Appl. Surf. Sci. 157, 29 (2000).
5. J. P. Gambino and E. G. Colgan, Mater. Chem. Phys. 52, 99 (1998).
6. K. C. R. Chiu, J. M. Poate, L. C. Feldman, and C. J. Doherty, Appl. Phys. Lett. 36, 544 (1980).
7. L. J. Chen and J. W. Mayer, Thin Solid Films 93, 135 (1982).
8. D. S. Wen, P. L. Smith, C. M. Osburn, and G. A. Rozgonyi, Appl. Phys. Lett. 51, 1182 (1987).
9. U. Erlesland, M. Ostling, and B. G. Svensson, Appl. Surf. Sci. 53, 224 (1991).
10. A. P. Knights, M. W. G. Ponjee, P. J. Simpson, M. Zinke-Allmang, and G. R. Carlow, Semicond. Sci. Technol. 12, 173 (1997).
11. S. Abhaya, G. Amarendra, G. L. N. Reddy, R. Rajaraman, G. Venugopal Rao, and K. L. Narayanan, J. Phys.: Condens. Matter 15, L713 (2003).
12. G. Amarendra, B. Viswanathan, G. Venugopal Rao, J. Parimala, and B. Purniah, Curr. Sci. 73, 409 (1997).
13. R. Krause-Rehberg and H. S. Leipner, Positron Annihilation in Semiconductors (Springer-Verlag, Berlin, 1999);
14. K. Saarinen, P. Hautojarvi, and C. Corbel, in Identification of Defects in Semiconductors, edited by, M. Stavola, (Academic, New York, 1998).
15. P. J. Schultz and K. G. Lynn, Rev. Mod. Phys. 60, 701 (1988).
16. A. P. Knights, G. R. Carlow, M. Zinke-Allmang, and P. J. Simpson, Phys. Rev. B 54, 13955 (1996).
17. A. Van Veen, H. Schut, J. de Vries, R. A. Hakvoort, and M. R. Ijpma, AIP Conf. Proc. 218, 171 (1990).
18. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res. B 9, 344 (1985).
19. N. P. Barradas, C. Jeynes, and R. P. Webb, Appl. Phys. Lett. 71, 291 (1997).
20. A. G. Italyantsev and A. Yu. Kuznetsov, Appl. Surf. Sci. 73, 203 (1993).