Ion beam sputtering coatings on large substrates: Toward an improvement of the mechanical and optical performances

Applied Optics

Volumn 45, Issue 7, 2006, Pages 1436-1439

  Cimma, Bernard ^a   Forest, Danièle ^a   Ganau, Patrick ^a   Lagrange, Bernard ^a   Mackowski, Jean Marie ^a   Michel, Christophe ^a   Montorio, Jean Luc ^a   Morgado, Nazario ^a   Pignard, Renée ^a   Pinard, Laurent ^a   Remillieux, Alban ^a  

^a UNIVERSITÉ LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; COATING TECHNIQUES; LIGHT SCATTERING; MULTILAYERS; SPUTTERING; TANTALUM COMPOUNDS;

ION BEAM SPUTTERING COATINGS; MECHANICAL LOSS; VIRGO INTERFEROMETER;

ION BEAMS;

EID: 33645312659     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001436     Document Type: Article

References (7)

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