Production of crystalline Si nano-clusters using pulsed H2 + SiH4 VHF discharges

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 288-291

  Kakeya, Tomohide ^a   Koga, Kazunori ^a   Shiratani, Masaharu ^a   Watanabe, Yukio ^a   Kondo, Michio ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Cluster; Crystallinity; Si; Solar cell

Indexed keywords

CRYSTALS; EFFICIENCY; HEATING; SILICON; SOLAR CELLS; SUBSTRATES; TEMPERATURE;

CRYSTALLINITY; DISCHARGE DURATION; PULSED H; VHF DISCHARGES;

NANOSTRUCTURED MATERIALS;

EID: 33645242722     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.090     Document Type: Conference Paper

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