Combinatorial deposition by r.f. magnetron sputtering using subdivided powder targets as new development method for thin-film phosphors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6037, Issue , 2006, Pages

  Miyata, Toshihiro ^a   Mochizuki, Yuu ^a   Minami, Tadatsugu ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROLUMINESCENCE; PHOSPHORS; PHOTOLUMINESCENCE; POWDERS; THIN FILMS;

COMBINATORIAL DEPOSITION; PHOTOLUMINESCENT EMISSION; POWDER TARGETS; THIN-FILM PHOSPHORS;

MAGNETRON SPUTTERING;

EID: 33645239289     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.638724     Document Type: Conference Paper

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