Characteristics of bistable transition in magnetized plasma by control of voltage biasing

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 564-570

  Shinohara, S ^a   Nakamura, Y ^a   Horii, S ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Density transition; Hysteresis; Magnetized rf plasma; Plasma profile; Voltage biasing

Indexed keywords

ELECTRIC POTENTIAL; ELECTRON TRANSITIONS; MAGNETIZATION; PLASMA DENSITY; PROBABILITY DISTRIBUTIONS;

BISTABLE TRANSITIONS; DENSITY TRANSITION; MAGNETIZED RF PLASMA; PLASMA PROFILE; VOLTAGE BIASING;

PLASMAS;

EID: 33645235868     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.267     Document Type: Article

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