Reaction rates of refractory metal oxidation in cold oxygen plasma

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 331-336

  Saburi, T ^a,c   Suzuki, T ^a   Kiuchi, K ^b   Fujii, Y ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Molybdenum; Plasma oxidation; Titanium; Zirconium

Indexed keywords

ACTIVATION ENERGY; CORROSION RESISTANCE; MOLYBDENUM; OXIDATION; PLASMAS; THERMAL EFFECTS; TITANIUM; ZIRCONIUM;

DEFINITE OXIDATION LAW; ELECTRO-MICROBALANCE; PLASMA OXIDATION;

REFRACTORY MATERIALS;

EID: 33645218609     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.077     Document Type: Conference Paper

References (17)

1. O. Kubaschewski, and B.E. Hopkins Oxidation of Metals and Alloys 1967 Butterworths UK
2. P. Kofstad High-Temperature Oxidation of Metals 1966 John Wiley New York
3. D.L. Douglass Oxidation of Metals and Alloys 1970 American Society for Metals Ohio
4. S. Kimura, E. Murakami, K. Miyake, T. Warabisako, H. Sunami, and T. Tokuyama J. Electrochem. Soc. 132 1985 1460
5. G.T. Salbert, D.K. Reinhard, and J. Asmussen J. Vac. Sci. Technol., A, Vac. Surf. Films 8 3 1990 2919
6. A.K. Ray, and A. Reisman J. Electrochem. Soc. 128 11 1981 2460
7. S. Gourrier, and M. Bacal Plasma Chem. Plasma Process. 1 1983 217
8. T. Sugano, F. Koshiga, and K. Yamasaki J. Eng. Zng. Univ. Tokyo, B 15 1980 553
9. A.T. Fromhold Thin Solid Films 95 1982 297
10. J. Siejka, and J. Perriere Phys. Thin Films 14 1989 81
11. M. Simnad, and A. Spilners Trans. AIME 203 1955 1011
12. T. Saburi, H. Murata, T. Suzuki, Y. Fujii, and K. Kiuchi J. Plasma Fusion. Res. 78 2001 1
13. W. Kinna, and W. Knorr Z. Met.kd. 47 1956 594
14. M.H. Davies, and C.E. Birchenall J. Metals N.Y. 3 1951 877
15. T. Hurlen J. Inst. Met. 89 1960 128
16. T. Suzuki, R. Tokunami, T. Saburi, and Y. Fujii Plasma Science Symposium 2001/the 17th Symposium on Plasma Processing, Kyoto (Japan) 2001 653
17. T. Suzuki, R. Tokunami, H. Murata, T. Saburi, and Y. Fujii 25th Inter. Conf. Phenomena in Ionized Gases, Nagoya (Japan) 2001 95