Surface plasma treatments enabling low temperature direct bonding

Microsystem Technologies

Volumn 12, Issue 5, 2006, Pages 378-382

  Moriceau, Hubert ^a   Rieutord, François ^b   Morales, Christophe ^a   Charvet, Anne Marie ^a  

^a CEA LETI   (France)

^b CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BINDING ENERGY; BONDING; LOW TEMPERATURE EFFECTS;

LOW TEMPERATURE TREATMENT; MICROWAVE PLASMA TREATMENT; X-RAY REFLECTIVITY;

PLASMA THEORY;

EID: 33645132487     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0058-y     Document Type: Conference Paper

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