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Journal of Applied Physics

Volumn 64, Issue 10, 1988, Pages 4943-4950

Bonding of silicon wafers for silicon-on-insulator

(4) Maszara, W P a Goetz, G a Caviglia, A a McKitterick, J B a

a HONEYWELL (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33644949327 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.342443 Document Type: Article

Times cited : (846)

References (16)

1
- 0014563672
- (1969) J. Appl. Phys , vol.40 , pp. 3946
- Wallis, G.¹ Pomerantz, D.I.²

2
- 0022767042
- (1986) J. Electrochem. Soc , vol.133 , pp. 1673
- Frye, R.C.¹ Griffith, J.E.² Wong, Y.H.³

3
- 0023043012
- (1986) Appl. Phys. Lett , vol.48 , pp. 78
- Lasky, J.B.¹

4
- 21544462953
- (1986) J. Appl. Phys , vol.60 , pp. 2987
- Shimbo, M.¹ Furukawa, K.² Fukuda, K.³ Tanzawa, K.⁴

5
- 0000477034
- (1964) J. Appl. Phys , vol.35 , pp. 647
- Gillis, P.P.¹ Gilman, J.J.²

6
- 0022160768
- (1985) J. Am. Ceram. Soc , vol.68 , pp. 586
- Michalske, T.A.¹ Fuller, E.R.²

7
- 0021201723
- (1984) J. Electrochem. Soc , vol.131 , pp. 161
- Raley, N.F.¹ Sugiyama, Y.² Van Duzer, T.³

8
- 0022662543
- (1986) Appl. Phys. A , vol.39 , pp. 73
- Grundner, M.¹ Jacob, H.²

9
- 0003746874
- (Wiley, New York).
- (1964) The Properties of Glass Surfaces , pp. 138
- Holland, L.¹

10
- 0016941803
- (1976) J. Mater. Sci , vol.11 , pp. 731
- Ball, A.¹ Payne, B.W.²

11
- 84967695539
- (1980) J. Electrochem. Soc , vol.127 , pp. 993
- Taft, E.A.¹

12
- 0023331380
- (1987) IEEE Electron Device Lett , vol.EDL-8 , pp. 137
- Spangler, L.J.¹ Wise, K.D.²

13
- 0015772701
- edited by H. R. Huff and R. R. Burgess (The Electrochemical Society Softbound Symposium Series, Princeton, NJ).
- (1973) Semiconductor Silicon 1973 , pp. 327
- Muraoka, H.¹ Ohhashi, T.² Sumitomo, Y.³

14
- 84950763991
- IEDM Technical Digest
- (1985)
- Lasky, J.B.¹ Stiffler, S.R.² White, F.R.³ Abernathey, J.R.⁴

15
- 84950839655
- (unpublished).
- McKitterick, J.¹ Caviglia, A.²

16
- 84950814949
- (unpublished).
- Caviglia, A.¹ McKitterick, J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.