Highly sensitive strain detection in silicon by reflectance anisotropy spectroscopy

Physical Review B - Condensed Matter and Materials Physics

Volumn 72, Issue 7, 2005, Pages

  Papadimitriou, D ^a   Richter, W ^b  

^a NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33644947035     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.72.075212     Document Type: Article

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