Rutherford backscattering spectrometry of electrically charged targets: Elegant technique for measuring charge-state distribution of backscattered ions

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 3 A, 2006, Pages 1823-1825

  Takahiro, Katsumi ^a,b   Terai, Atsushi ^a   Kawatsura, Kiyoshi ^a   Naramoto, Hiroshi ^c   Yamamoto, Shunya ^c   Tsuchiya, Bun ^d   Nagata, Shinji ^d   Nishiyama, Fumitaka ^e  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

^d TOHOKU UNIVERSITY   (Japan)

^e HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Backscattered ions; Charge state; Equilibrium charge state; Rutherford backscattering spectrometry; Surface charging; Surface peak

Indexed keywords

ELECTRIC CHARGE; ELECTRON ENERGY LEVELS; IONS; SPECTRUM ANALYSIS;

BACKSCATTERED IONS; CHARGE STATES; EQUILIBRIUM CHARGE STATES; RUTHERFORD BACKSCATTERING SPECTROMETRY; SURFACE CHARGING; SURFACE PEAK;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 33644905050     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.1823     Document Type: Article

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