Processing of diamond and ceramics by picosecond/nanosecond laser pulses in IR-UV spectral range

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3343, Issue , 1998, Pages 458-464

  Kononenko, Taras V ^a   Garnov, Serge V ^a   Pimenov, Sergej M ^a   Konov, Vitali I ^a   Dausinger, Friedrich ^b  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Ceramics; Diamond; Microprocessing; Short pulse laser

Indexed keywords

ASPECT RATIO; BEAM PLASMA INTERACTIONS; CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; CUTTING; DIAMOND DRILLING; DIAMOND FILMS; DIAMONDS; LASER ABLATION; LASER RADIATION; LASERS; PRESSURE DROP; PULSED LASER DEPOSITION; SILICON CARBIDE; THICKNESS MEASUREMENT;

ABLATION RATES; ALN; BOTTOM ROUGHNESS; CERAMICS; CVD DIAMONDS; CVD-DIAMOND FILMS; DEEP HOLES; EXPERIMENTAL STUDIES; HARD MATERIALS; IN-PLANE STRUCTURES; LASER DRILLINGS; LASER FLUENCE; LASER MICRO-STRUCTURING; LASER PROCESSING; LASER SYSTEMS; LASER-PLASMA INTERACTIONS; MICRO-STRUCTURING; MICROPROCESSING; PICOSECOND; PULSE ENERGIES; PULSE WIDTHS; RADIATION PARAMETERS; SHORT PULSE LASER; STEEP WALLS; SURFACE LAYERS; UV SPECTRAL RANGES; WAVEGUIDE PROPAGATION;

PULSED LASER APPLICATIONS;

EID: 33644868628     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321584     Document Type: Conference Paper

References (5)

1. V.G. Ralchenko, S.M. Pimenov, 'Laser processing of diamond films', Diamond Films and Technology, vol. 7, 1, pp.15-40, 1997.
2. A. Raiber, T. Abeln, F. Dausinger, H. Hügel, 'Micro-machining by direct-writing with solid-state-lasers', Proc. of the 6th European Conf. on Laser Treatment of Materials, vol.2, pp.733-740, 1996.
3. W. Kautek, J. Kruger, 'Femtosecond-pulse laser ablation of metallic, semiconducting, ceramic and biological materials', SPIE Vol. 2207, pp.600-610, 1994.
4. T.V. Kononenko, S.V. Garnov, S.M. Klimentov, V.I. Konov, E.N. Loubnin, F. Dausinger, A. Raiber, C. Taut, 'Laser ablation of metals and ceramics in picosecond-nanosecond pulsewidth in the presence of different ambient atmospheres', Applied Surface Science, 109/110, pp.48-51, 1997.
5. S.V. Garnov, S.M. Klimentov, T.V. Kononenko, V.I. Konov, E.N. Loubnin, A.M. Prokhorov, F. Dausinger, A. Raiber, C. Taut, "Ablation of AIN ceramics by multipulsed picosecond radiation at wavelength of 1078 and 539 nm", Laser Physics, vol. 6, 3, pp. 600-607, 1996.