Removal of phosphorus and antimony in silicon by electron beam melting at low vacuum

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals

Volumn 70, Issue 1, 2006, Pages 43-46

  Miyake, Masao ^a   Hiramatsu, Tomoaki ^a,b,c   Maeda, Masafumi ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c NEC CORPORATION   (Japan)

Author keywords

Antimony; Electron beam melting; Glow discharge electron gun; Phosphorus; Silicon; Vacuum refining

Indexed keywords

GLOW DISCHARGE ELECTRON GUN; VACUUM REFINING;

ELECTRON BEAM MELTING; ELECTRON GUNS; EVAPORATION; LIQUID METALS; PHOSPHORUS; REMOVAL; SILICON;

ANTIMONY;

EID: 33644808036     PISSN: 00214876     EISSN: None     Source Type: Journal    
DOI: 10.2320/jinstmet.70.43     Document Type: Article

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