A method for undercut formation of integrated shadow mask used in passive matrix displays

Thin Solid Films

Volumn 503, Issue 1-2, 2006, Pages 246-249

  Huang, Z H ^a   Qi, G J ^a   Zeng, X T ^a   Su, W M ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

Integrated shadow mask; Photolithography

Indexed keywords

CATHODES; DEPOSITION; LIGHT EMITTING DIODES; METAL ANALYSIS; PHOTOLITHOGRAPHY; PHOTORESISTS;

INTEGRATED SHADOW MASK; PASSIVE MATRIX DISPLAYS; STRIP PILLARS;

DISPLAY DEVICES;

EID: 33644770154     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.10.052     Document Type: Article

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