General model for estimating bubble dissolution and droplet evaporation times

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 3, 2005, Pages

  Shedd, Timothy A ^a,b  

^a University of Wisconsin Madison   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

Bubble dissolution; Evaporation; Flows; Submicron lithography; Water

Indexed keywords

BUBBLE DISSOLUTION; FLOWS; IMMERSION LITHOGRAPHY; SUBMICRON LITHOGRAPHY;

ADHESION; DISSOLUTION; DROP BREAKUP; EVAPORATION; LITHOGRAPHY; NITROGEN; WATER;

BUBBLES (IN FLUIDS);

EID: 33644750709     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2037427     Document Type: Article

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