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Volumn 97, Issue 1, 2006, Pages 1-4
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Development of the pneumatic valve with bimorph type PZT actuator
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Author keywords
Directional control; Micro valve; Pneumatic valve; PZT actuator; PZT driving circuit
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Indexed keywords
CONTROL SYSTEMS;
ENVIRONMENTAL IMPACT;
FERROELECTRIC MATERIALS;
HYSTERESIS;
PIEZOELECTRIC DEVICES;
PNEUMATIC CONTROL EQUIPMENT;
THRESHOLD VOLTAGE;
DIRECTIONAL CONTROL;
FIELD BUS SYSTEMS;
LOW ENERGY CONSUMPTION;
MICRO VALVE;
OPERATING FREQUENCY;
PNEUMATIC VALVE;
PZT ACTUATOR;
PZT DRIVING CIRCUIT;
ACTUATORS;
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EID: 33644666089
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matchemphys.2004.09.050 Document Type: Article |
Times cited : (41)
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References (12)
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